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Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.
Product Details
- Edition:
- 1st
- Published:
- 10/20/2006
- ISBN(s):
- 0733777929
- Number of Pages:
- 22
- File Size:
- 1 file , 690 KB
- Product Code(s):
- 10103377, 10103364, 10103400